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abstract about electrostatic precipitator

Sep 11, 2020 Abstract: An integrated electrostatic precipitator (ESP) and wet scrubber system were developed to control nitrogen oxides (NOx) and particulate matter (PM) emissions from a semiconductor manufacturing process. The integrated system consisted of a NO oxidizer, wet scrubber, and ESP. In the NO oxidizer, NO gas was fully oxidized to NO2 by O3 before the flow gas entered the wet scrubber

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